Atmospheric Furnace with Dew Point Control System
Outline
Tools for firing process of MLCC
Features
Independent programmable control of N2 and H2 gas system
Dew point control from -20ºC to 50ºC by mixing partly humidifying N2 and H2 gas with dry gas
High sensitivity O2 detector
High Vacuum Atmospheric Furnace
Outline
Tools for heat treatment of electronic materials and devices
Features
10-6 torr within 20 minutes
Rapid temperature increase and down by Gold furnace
Excellent for the use in a clean room
Diffusion Furnace
Outline
Diffusion Furnace for 200mm Si Process
Hot Pressing Furnace
Outline
Hot press tool for production of sputtering target for Optical recording media.
