Our Strong Point Technology & Products Business Domain Corporate Information Contact Us
Technology & Products
Technology & Products
MRAM
Magnetic Head
Oven Furnace System
Single Crystal Growth
Future Technology
MRAM
Vertical Magnetic Annealing Oven for 300mm Process
Outline
Tool for Magnetic Annealing of 200mm or 300mm MRAM wafers in a quartz core tube oven under the vacuum condition or inactive atmosphere .
Features
  • 1Tesla Permanent Magnet
    Field 1Tesla +/-3%
    Skew angle within +/- 1.0º
  • Capacity 50wafers
  • Quartz core tube oven
  • Annealing Temperature : 150 to 400 ºC (Max. 500 ºC)
  • Vertical 3 zone heater with High temperature Unifomity
    Within Wafer within +/- 1.0ºC
    Within 50 wafers batch within +/- 1.0ºC
  • Vacuum <7x10-4Pa
  • Automatic Wafer handling System
  • Throughput 11 wafers/hour at 2hours soaking anneal
  • Clean Air flow system
  • Comply for SEMI S2,S8
  • Comply for SECS/GEM Network protocol
Horizontal Magnetic Annealing Oven for 300mm Process
Outline
Tool for Magnetic Annealing of 200mm or 300mm MRAM wafers in a quartz core tube oven under the vacuum condition or inactive atmosphere .
Features
  • 1∼3 Tesla Superconducting Magnet
    Magnetic Field Max 3Tesla +/-3%
    Skew angle within +/- 1.0º
  • Capacity 25 wafers
  • Vacuum <10-4Pa
  • Automatic Wafer handling System
  • Throughput 11 wafers/hour at 2hours soaking anneal
  • Clean Air flow system
  • Comply for SEMI S2,S8
  • Comply for SECS/GEM Network protocol

Back to Top